vacuum chuck

基本解释

There are water cooling target chuck and back flanges on the top of the vacuum chamber.
真空室顶部预留了法兰口并配有冷却靶台。
We can combine a certain material, namely, artificial bristle material, which has the same function of a wall lizards feet with the vacuum chuck to improve the function of present equipment.
利用壁虎爬墙的原理，制造出能和壁虎的脚功能相近的材料，把壁虎的爬墙功能和现有的真空吸盘式爬墙系统结合起来，弥补现有设备的缺陷。
According to schemes analysis, vacuum chuck with porous ceramic is selected for the vacuum clamping system.
通过对硅片夹持系统方案的分析，选用多孔陶瓷真空吸盘，并在此基础上研制了真空夹持系统。