短语词组短語trench etch 凹刻蝕deep trench etch 深槽刻蝕metal trench Etch 金屬溝槽刻蝕工藝silicon trench etch 矽槽刻蝕Trench Etch and Refill Isolation 開槽廻填隔離 返回 etch trench